Technical characteristics
Determine the complete lattice orientation of a single crystal
Ultra high speed crystal positioning measurement using Omega scanning method
Determination of arbitrary unknown orientation of cubic crystals
Specially designed for azimuth setting and marking in lattice direction
Air cooled X-ray tube, no need for water cooling
Suitable for research and production quality control
X-ray single crystal directional instrument
All desired crystal orientation parameters are captured in one rotation within 5 seconds
Examples of Measurable Materials
Ø Cube/Any unknown direction: Si, Ge, GaAs, GaP, InP
Ø Cubic/Special orientation: Ag, Au, Ni, Pt, GaSb, InAs, InSb, AlSb, ZnTe, CdTe, SiC3C, PbS, PbTe, SnTe, MgO, LiF, MgAl2O4, SrTiO3, LaTiO3
Ø Square: MgF2, TiO2, SrLaAlO4
Ø Hexagonal/triangular: SiC 2H, 4H, 6H, 15R, GaN, ZnO, LiNbO3, SiO2 (quartz), Al2O3 (sapphire), GaPO4, La3Ga5SiO14
Ø Orthorhombic crystal system: Mg2SiO4 NdGaO3
Ø Further material selection can be made according to customer requirements
X-ray single crystal directional instrument
Application of DDCOM
Marking and measurement of plane direction
During the injection and lithography process of wafers, flat or grooved surfaces are required as positioning markers. During the cutting process, the chip must correctly align with the lattice planes on the quasi crystal wafer that are easy to cut. Therefore, it is crucial to check the position of the plane or gap.
To determine the position of a plane or gap, it is necessary to measure the components within the plane. Due to the Omega scanning method being able to determine the complete crystal orientation in a single measurement, it is possible to directly identify units or gaps in the plane direction or inspection direction.
DDCOM can convert any plane direction to a specific position specified by the user by rotating the turntable. When it is necessary to define the plane direction, this can greatly simplify the process of applying markers to specific plane directions.