2. Auger analysis was conducted with a 20kV accelerating voltage and current of 1nA, and the spatial resolution of AES can reach ≤ 8nm
3. While retaining all the advantages of CMA, coupled with the high-energy resolution feature that has won the AVS (American Vacuum Society) design award, AES can be used for chemical state analysis in various nanoscale regions
4. Windows compatible software
Brand: PHI
Model: PHI 710
Minimum order quantity: 1
Unit: Unit
Packaging instructions: Standard packaging
1. applyCMATongzhou analyzer, achieving high sensitivity and high transmission rate simultaneously. Even in low current and high spatial resolution situations, analysis can be easily performed.
2. with20kVAccelerated voltage and current1nAPerform Auger analysis,AESThe spatial resolution can reach ≤8nm
3. Keep allCMAAt the same time, it also has the advantages of obtainingAVSThe high-energy resolution feature of the American Vacuum Society Design Award canAESConduct chemical state analysis of various nanoscale regions
4. WindowsCompatible software
High sensitivity and high-throughput analyzer for coaxial cylindrical mirror analysisCMA
1.Coaxial cylindrical mirror analyzer
coaxialCMAyesPHIThe company places an electron gun on the central axis of its electronic spectrometer.CMACapable of various aspects360The collection of Auger electrons generated by the sample has the advantage of not being affected by sample morphology and tilt angle. The following figure shows coaxialCMAAnd non coaxial spectrometerSCASensitivity characteristics of.CMABoth vertical and angular incidence exhibit high sensitivity and low angle dependence. Therefore, good quantitative results can be obtained by analyzing samples with various morphologies using various incidence angles.
△coaxialCMAAnd non coaxial analyzerSCAComparison of sensitivity
2.Comparative analysis of samples with complex morphology
Comparison of the following figureCMAandSCACollected copper and tin ballsSEMImaging and Auger composition imaging,SCAThe shadow effect of the composition map between China and Russia is very obvious, andCMAObtainedSEMThe image and Auger component image can accurately reflect the true results.
△In spherical samplesCMAandSCAComparison of data
SEMSpatial resolution ≤3nm
AESComponent image spatial resolution ≤8nm
Auger analysis passedSEMObserve and determine the analysis location, then perform spectrum acquisition, component distribution imaging, and depth analysis. staySEMObservation requires a small focused electron beam spot and Auger analysis, requiring a very stable electron beam.
SEMThe imaging resolution can reach3About nanometers,AES710Using a low-noise power supply (Figure1）Using soundproof covers to reduce the impact of vibration, sound, and temperature,AESThe resolution during analysis can reach8nm（20kV 1nA）
chart2Case: Analysis of intergranular impurities in the cross-section of ductile iron.
chart2As shown: Secondary electron image,Ca(Blue)Mg(Green)Ti(Red) Auger composition image, andSThe distribution of Auger components indicates thatAESChemical analysis capability of nanoscale micro regions.
AESChemical state analysisGraph and distribution image
PHI710 AESThe component image, corresponding to each pixel, can be used to analyze the chemical state of the element, and then image the chemical state.
High energy resolution
The following figure shows the electrodes of semiconductor chipsSi KLLHigh energy resolution component distribution map of. fromSi KLLSpectral fitting using small multiplication（LLS）Three main components are identified: silicon, silicon oxynitride, and metal silicides, and the distribution of their chemical states on the same surface can be obtained.
△Example of Semiconductor Chip Electrode Analysis
base onWindowsSystem operating software and data processing software
SmartSoftTM-AES(Operating software)
SmartSoft AESIt's in theWindowsRunning on the systemPHI710Control software. Software settingsAESThe analysis operation process is displayed on the screen, making it easy for even beginners to master. To improve analysis efficiency and measure position in real-time,SEMFigures, Auger distribution maps, and spectra can all be presented by colleagues.ZalarThe rotation function enables flexible implementation of deep analysis, automation of baking and vacuum control. The following image shows the operation screen.
PHI MultiPakTM(Data analysis software)
Provide analysis softwarePHI MultiPakImprove Auger analysis. Support for quick report creation and provide support based onWINDOWS
The system's easy-to-use data processing capabilities and data analysis capabilities.
